-
Corial Plasma Therm – Corial 200FA RIE Etch system
The Corial 200FA combines the advantages of high rates with low cost of ownership for IC failure analysis applications….
-
Corial Plasma Therm – Corial 200I ICP-RIE etch system
The Corial 200R is a compact, easy-to-use system for reactive ion etching of silicon-based compounds, metals and polymers…..
-
Corial Plasma Therm – Corial 200S RIE etch system
This simple-to-use, manually-loaded RIE system can etch a wide range of materials including silicon, silicon-based compounds, metals, and polymers with fluorinated gases….
-
Corial Plasma Therm – Corial 210IL ICP-RIE etch system
The Corial 210D ICP-CVD system is ideal for R&D centers, and offers a wide range of applications for the specialty semiconductor markets….
-
Corial Plasma Therm – Corial 210RL RIE etch system
The Corial 210RL offers a flexible solution for reactive ion etching of wafer pieces, or up to full 200 mm wafers….
-
Corial Plasma Therm – Corial 300S RIE etch system
With chrome and quartz etch capabilities, the Corial 300S RIE system is ideal for mask repair. This product can process….
-
Corial Plasma Therm – Corial 360IL ICP-RIE etch system
Light up the world with the ICP-RIE equipment offering industry-leading uniformity and repeatability for PSS applications
-
Corial Plasma Therm – Corial 360RL RIE etch system
With chrome and quartz etch capabilities, the Corial 360RL RIE system is ideally suited for mask repair. This product can….
-
PLASMA THERM – QuaZar™ Planetary IBE
Plasma-Therm’s QuaZar Planetary IBE incorporate a unique feature of planetary scanning technology – the ability to sweep the wafer in a oscillatory manner across the ion beam….
-
PLASMA THERM – Takachi ICP
The Takachi is a robust ICP technology based on Plasma-Therm’s proven Shuttlelock® platform now available in a much smaller footprint. The reliable hardware, ease of operation, and low cost make the Takachi ideal for a wide range of uniform, high quality ICP etch applications serving R&D, FA, prototyping, pilot….
-
PLASMA THERM – VERSALINE® ICP
Plasma-Therm’s VERSALINE ICP is the product resulting from decades of technological evolution. Well-known and accepted product lines including the 790, Shuttlelock, and Versalock all played a role in the development of the VERSALINE ICP…..
-
PLASMA THERM- QuaZar™ Systems
The systems use best-in-class software, components, electrical and mechanical design. The result is a platform that can be rapidly configured for a wide range of applications. The tools are qualified and in volume production in 200 mm fabs…..
Shop By Department
- Nanotechnology
- Vacuum Technology
- Vacuum Pumps
- Vacuum Gauges
- Vacuum Valves
- Right-Angle Valves and Straight-Through Valves
- UHV Gate Valve
- Miniature HV Gate
- HV Gate Valve
- Power Failure Venting Valve
- Ball valve
- Pressure Relief Valve
- Vacuum Lock Valve
- Variable Leak Valve With Isolation Valve
- Secuvca Valve
- UHV All-Metal Valve
- Vacuum Sealing Valve
- UHV All-Metal Variable Leak Valve
- Venting Valve
- Vacuum Fitting
- Leak Detection
- Residual Gas Analysers
- Glove Box
- Freeze Dryers
- Vacuum Chambers
- UHV Sample Preparation
- Laboratory Equipment
- Home
- Application
- Nanotechnology Research
- Deposition
- Etching
- Growth
- Cleaning
- Dry Release/ Surface Modification
- Plasma Dicing
- Bonding
- Consumables
- Vacuum Pumps
- Vacuum Gauges
- Vacuum Valves
- Vacuum Fitting
- Leak Detection
- Glove Box
- Vacuum Chambers
- UHV Sample Preparation
- General Laboratory Equipment
- Microscopes
- Safety Cabinets
- Lab Storages and Cabinets
- Nuclear Research
- Space Simulation Research
- Synchrotron Radiation Research
- Pharmaceutical Research
- Material Science Research
- Environmental Research
- Waste Water/ Water Treatment Research
- Biological Science Research
- Brewery/ Winery
- Food QA/QC Laboratory
- Marine Biology Research
- Nanotechnology Research
- Company
- Partners
- Downloads
- Careers
- Contact Us