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CF150, CF200 rectangle UHV chamber
Material：S.S.304
Surface treatment: electro-polishing
Specification：CF150、CF200 rectangle UHV chamber
Leak rate<2 x10-10mbar.l/sec
Operation Pressure<7.5×10-10torr
When the total pressure is below 1 x10-9 torr, partial pressure of above 45amu is <0.1%.
RGA detection and analysis
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Leybold – 24-3/8”CF Flange UHV chamber
Material：S.S.304
Surface treatment: Electro-polished
Spec: 24-3/8” CF flange
Leakage rate<5×10-10 mbar.l/sec
Operation pressure<7.5×10-10 torr
When the total pressure is below 1 x10-9 torr, partial pressure of above 45amu is <0.1%.
RGA analysis
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