Corial Plasma Therm – Corial 360IL ICP-RIE etch system

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Light up the world with the ICP-RIE equipment offering industry-leading uniformity and repeatability for PSS applications

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Corial 360IL ICP-RIE etch system in brief in brief

The Corial 360IL is a large area plasma etch system offering high throughput, without compromising process performance or quality.

The 360IL is based on CORIAL’s latest generation ICP (inductively coupled plasma) source. The system features a high-density plasma, 2 MHz ICP RF generator, and state-of-the-art gas injection, allowing fast etch rates and excellent uniformities.

Featuring a vacuum load-lock, the Corial 360IL delivers stable process conditions, short pump cycles and provides the capability to run fluorinated and chlorinated based chemistries on the same tool.

Key benefits

PROCESS FLEXIBILITY

The RF match box operating range (from 100 W to 2000 W) supports a wide range of customer applications

The vacuum load lock enables using a combination of fluorinated and chlorinated chemistries in the same tool

HIGH ETCH RATE CAPABILITY

Wall temperature > 250°C; ICP max power: 2000 W; RF max power: 1000 W; high efficiency of RF coupling to plasma

Fast and uniform etching: GaAs (500 nm/min), Sapphire (75 nm/min), GaN (200 nm/min) …

BEST REPEATABILITY

Load lock for stable and repeatable process conditions

Novel cathode design and efficient helium back side cooling of the shuttle and substrate ensure uniform temperature control (from -50°C) during the etch process

EXCELLENT UNIFORMITY

High density plasma enables highly uniform PSS profiles

Optimized gas showerhead with top gas inlets

OPTIMIZED LONG-LIFE SHUTTLE

Proprietary quartz shuttle (carrier) design for PSS, with edge effect < 1 mm

Quartz carrier lifetime > 5,000 runs

HIGH THROUGHPUT

Large batch capacity: 23 x 2”, 7 x 4”, 3 x 6”

Throughput > 8 WPH for PSS application using 4″ substrates

Related processes

Typical materials that can be processed with the Corial 360IL ICP-RIE system include:

  • Silicon
  • Oxides: SiO2, Si3N4
  • III-V compounds: GaN, AlGaN, InP

The Corial 360IL can serve a variety of applications in specialty semiconductors markets including optoelectronics, MEMS, power devices and many other markets.

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