Fein Optic – M46 Metallurgical Microscope

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The Fein Optic M46 metallurgical brightfield microscope is an ideal microscope for wafer inspection. This critical dimension metrology microscope is available with reflected ligth only or with both reflected and transmitted light. The 6″ stage provides room for viewing wafers, semiconductors, or slice substrates. The Fein Optic M46 microscope provides brightfield, darkfield, polarization and DIC contrast microscopy. A variety of objective lenses are available.

Specifications

Optical System Infinity Color Corrected Achromatic Optical System
Observation M46-TRF: Brightfield, Darkfield, Polarization, DIC, Transmitted Illumination
M46-RF: Brightfield, Darkfield, Polarization, DIC
Viewing Head 30° Inclined trinocular viewing head, erect image. Splitting ration: 100:0 or 0:100. Interpupillary distance adjustable from 50mm – 76mm.
Eyepieces High eyepoint WF PL10x / 22mm, with reticle retaining ring for 26mm diameter reticle.
Objective Lenses Infinity Corrected LWD Brightfield Plan Achromat 5x, 10x, 20x, 50x, 100x.
Infinity Corrected High Resolution Brightfield Semi Apo 5x, 10x, 20x, 50x, 100x.
Infinity Corrected LWD BD Plan Achromat Objectives 5x, 10x, 20x, 50x, 100x
Infinity Corrected High Resolution BD Plan Achromat 5x, 10x, 20x, 50x, 100x.
Infinity Corrected BD Plan Achromat 5x, 10x, 20x, 50x, 100x.
Nosepiece Quintuple brightfield / darkfield nosepiece with DIC slot.
Focus Adjustment Low position coaxial focus mechanism, coarse range: 33mm, fine precision: 0.001mm. Upper limit and tension adjustment.
Power Power supply 90~240V wide voltage system.
Stage M46-RF: 6″ three layer mechanical stage with low position coaxial adjustment. Moving range: 158mm x 158mm. Clutch handle for quick movement and glass plate for reflected use.
M46-TRF: 6″ three layer mechanical stage with low position coaxial adjustment. Moving range: 100mm x 100mm. Clutch handle for quick movement and glass plate for reflected/transmitted use.
Illumination M46-RF: 12v / 100w halogen BD reflected illuminator with electronic variable aperture and field diaphragm, center adjustable with switch for changing from brightfield to darkfield. Slots for filters and polarizing kit.
M46-TRF: 12v / 100w halogen BD reflected illuminator with electronic variable aperture and field diaphragm, center adjustable with switch for changing from brightfield to darkfield. Slots for filters and polarizing kit. Transmitted 5W LED illumination, brightness adjustable.
Condenser M46-RF: No condenser included.
M46-TRF: NA 0.5x condenser with iris diaphragm.
Polarization Analyzer with rotatable polarizer.
C-Mount Adapter 0.5x C-Mount Adapter
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